[Line-Tech] 디지털 MFC
Line-Tech, 디지털 digital MFC, MFC, Mass flow controller, 질량 유량 컨트롤러
제품개요
기술자료
액세서리
프로브Digital Mass Flow Controller
특징 : Accurate at Low flow
Fast response
Compact connection
Highly stable removable sensor
High corrosion resistance
Excellent linearity
Excellent long-term stability
Wide pressure range available
Digital Communication [PIN 14, 15]
RS-485
Baud rate 38400bps
Date 8bit
Stop bite 1 bit
Parity None
1. MD30C
사양 : 측정범위 : 0.01slpm~30slpm
응답속도 : < 2sec
정확도 : ±0.25% of FS
반복성 : ±0.25%
In/Out 출력 : 0~5V 또는 4~20mA
Power : 24Vdc, 350mA
Over pressure : < 90bar
Oper' Temp : 0~50°C
Leak rate : 1*10 -9atm, cc/sec
Control range : 3~100%
Communication : RS485
연결사이즈 : 1/8"SW / 126.7 "A" Dimesion
1/4"SW / 131.3 "A" Dimesion
3/8"SW / 133.6 "A" Dimesion
1/4"VCR / 128 "A" Dimesion
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2. MD100C
사양 : 측정범위 : 30slpm~100slpm
응답속도 : < 2sec
정확도 : ±0.25% of FS
반복성 : ±0.25%
In/Out 출력 : 0~5V 또는 4~20mA
Power : 24Vdc, 350mA
Over pressure : < 90bar
Oper' Temp : 0~50°C
Leak rate : 1*10 -9atm, cc/sec
Control range : 3~100%
Communication : RS485
연결사이즈 : 1/4"SW / 145.2 "A" Dimesion
3/8"SW / 147.1 "A" Dimesion
1/2"SW / 151.8 "A" Dimesion
1/4"VCR / 141.5 "A" Dimesion
1/2"VCR / 149 "A" Dimesion
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3. MD300C
사양 : 측정범위 : 100slpm~300slpm
응답속도 : < 2sec
정확도 : ±0.25% of FS
반복성 : ±0.25%
In/Out 출력 : 0~5V 또는 4~20mA
Power : 24Vdc, 350mA
Over pressure : < 15bar
Oper' Temp : 0~50°C
Leak rate : 1*10 -9atm, cc/sec
Control range : 3~100%
Communication : RS485
연결사이즈 : 1/4"SW / 174.7 "A" Dimesion
3/8"SW / 177.4 "A" Dimesion
1/2"SW / 181.3 "A" Dimesion
1/4"VCR / 171 "A" Dimesion
1/2"VCR / 178.5 "A" Dimesion
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4. MD500C
사양 : 측정범위 : 300slpm~1,000slpm
응답속도 : < 2sec
정확도 : ±0.25% of FS
반복성 : ±0.25%
In/Out 출력 : 0~5V 또는 4~20mA
Power : 24Vdc, 350mA
Over pressure : < 15bar
Oper' Temp : 0~50°C
Leak rate : 1*10 -9atm, cc/sec
Control range : 3~100%
Communication : RS485
연결사이즈 : 1/2"SW / 246.1 "A" Dimesion
3/4"SW / 246.2 "A" Dimesion
1"SW / 254.6 "A" Dimesion
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5. MD600C
사양 : 측정범위 : 1,000slpm~1,500slpm
응답속도 : < 2sec
정확도 : ±0.25% of FS
반복성 : ±0.25%
In/Out 출력 : 0~5V 또는 4~20mA
Power : 24Vdc, 350mA
Over pressure : < 6 bar
Oper' Temp : 0~50°C
Leak rate : 1*10 -9atm, cc/sec
Control range : 3~100%
Communication : RS485
연결사이즈 : 1/2"SW / 246.1 "A" Dimesion
3/4"SW / 246.2 "A" Dimesion
1"SW / 254.6 "A" Dimesion
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6. MD700C
사양 : 측정범위 : 1,500slpm~2,000slpm
응답속도 : < 2sec
정확도 : ±0.25% of FS
반복성 : ±0.25%
In/Out 출력 : 0~5V 또는 4~20mA
Power : 24Vdc, 350mA
Over pressure : < 6 bar
Oper' Temp : 0~50°C
Leak rate : 1*10 -9atm, cc/sec
Control range : 3~100%
Communication : RS485
연결사이즈 : 1/2"SW / 248.1 "A" Dimesion
3/4"SW / 248.2 "A" Dimesion
1"SW / 256.6 "A" Dimesion
